JPH01166081U - - Google Patents
Info
- Publication number
- JPH01166081U JPH01166081U JP6461788U JP6461788U JPH01166081U JP H01166081 U JPH01166081 U JP H01166081U JP 6461788 U JP6461788 U JP 6461788U JP 6461788 U JP6461788 U JP 6461788U JP H01166081 U JPH01166081 U JP H01166081U
- Authority
- JP
- Japan
- Prior art keywords
- hand
- electromagnet
- flange portion
- side flange
- permanent magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 210000000707 wrist Anatomy 0.000 claims description 2
- 238000005553 drilling Methods 0.000 claims 1
- 230000002441 reversible effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6461788U JPH01166081U (en]) | 1988-05-17 | 1988-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6461788U JPH01166081U (en]) | 1988-05-17 | 1988-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01166081U true JPH01166081U (en]) | 1989-11-21 |
Family
ID=31290082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6461788U Pending JPH01166081U (en]) | 1988-05-17 | 1988-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01166081U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0417376U (en]) * | 1990-05-30 | 1992-02-13 | ||
| JP2006120799A (ja) * | 2004-10-20 | 2006-05-11 | Tokyo Electron Ltd | 基板処理装置、基板載置台交換方法、及びプログラム |
-
1988
- 1988-05-17 JP JP6461788U patent/JPH01166081U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0417376U (en]) * | 1990-05-30 | 1992-02-13 | ||
| JP2006120799A (ja) * | 2004-10-20 | 2006-05-11 | Tokyo Electron Ltd | 基板処理装置、基板載置台交換方法、及びプログラム |